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Application ID | 2120961 |
Proprietor(s) | TEL SOLAC AG |
Attorney | - |
Status | Objected |
Date of Application | Mar 24, 2011 |
Class(es) | 7, 42, 37 |
Type | - |
Registration State | - |
Country | - |
Published | - |
Filing Mode | - |
IP Office | - |
Used Since | - |
Valid/Upto | - |
Details | [Class - 7] Machines and Equipment for plasma-assisted manufacturing or plasma treatment of workpieces such as semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices (like LED and OLED), namely: Vacuum treatment systems for plasma-assisted deposition, plasma treatment and plasma etching, in particular vacuum systems for thin film coating (especially PECVD, PACVD); vacuum dry etching equipment, plasma treatment equipment, parallel plate reactors. [Class - 42] Scientific services and research work, namely: construction, design and analysis of plasma processes, semiconductor products, vacuum treatment systems for plasma assisted manufacturing and treatment processes. |