NANOSMOOTH
OERLIKON ADVANCED TECHNOLOGIES AG.

[Class - 1]

COATINGS AND THIN LAYERS OF SEMICONDUCTORS, METALS, DIELECTRICS OR PLASTICS OR THEIR COMPOUNDS SUCH AS OXIDES, NITRIDES, OXINITRIDES OR CARBIDES ON SUBSTANCES SUCH AS GLASS, SEMICONDUCTORS, METAL, CERAMIC, PLASTIC OR COMPOSITIONS OF SUCH

[Class - 7]

MACHINES AND EQUIPMENT FOR THE MANUFACTURE OR PROCESSING OF WORKPIECES SUCH AS SEMICONDUCTOR PRODUCTS, PHOTOVOLTAIC DETECTORS, SOLAR CELLS, LIGHT-EMITTING DEVICES (SUCH AS LED AND OLED), TOOLS AND PARTS, NAMELY VACUUM TREATMENT PLANTS FOR COATING, EVAPORATION, PLASMA TREATMENT AND PLASMA ETCHING, ESPECIALLY VACUUM PLANTS FOR THIN-FILM COATING, EVAPORATION, EPITAXY AND PLASMA TREATMENT