EVATEC
Evatec AG

[Class - 9]

Electronic devices and instruments for regulating, controlling, and monitoring; electronic devices and instruments for the controlling and treatment of surfaces; optical, electric, magnetic, spectroscopic sensors; measuring and control devices, namely for measuring the growth of layers or the removal of coatings in thin-film processing installations; optical controllers and devices for measuring layer thickness of crystal oscillators, scientific instruments, namely chip media cleaners for the surface cleaning of electronic components, plasma cleaning units for the pre-treatment of substrates which are to be coated in a vacuum installation or in support of coating processes; laboratory devices and instruments, namely thin film technology accessories, in particular sputtering cathodes, plasma sources, sputtering targets, sputtering shields, sputtering masks, vacuum coating filaments, vacuum coating shuttles, ceramic crucibles, substrate carriers, and gas introduction systems; computer programs, in particular for regulating, controlling, and monitoring surfaces and surface treatments; vacuum measuring devices; sputtering cathodes; quartz crystals for measuring layer thickness.